中国科学院分子纳米结构和纳米技术重点实验室中国科学院分子纳米结构与纳米技术重点实验室的前身是白春礼院士于1987年建立的STM实验室（1994年成为中国科学院纳米科学与技术青年实验室，目前承担国家基金委、中国科学院和国家科技部的多项科研项目

中国科学院上海微系统与信息技术研究所原名中国科学院上海冶金研究所，围绕“电子科学与技术”、“信息与通信工程”两大新的学科方向，利用上海微系统所在功能材料与器件研究方面的积累和微电子平台工艺技术为支撑，以“小卫星、微系统技术平台”两个重大项目为依托，以系统带器件、器件带材料、加强原始创新，加强关键技术创新与集成研究，开展集成微光机电系统、天地一体化通信技术与系统，信息功能材料与器件、微型和新型能源技术与系统等研究活动

中国科技大学纳米结构与物理研究室由中科院结构分析重点研究实验室和中国科学院选键化学重点实验室联合组成，成立于1998年；主要研究领域：基于C60的单分子器件研究、金属纳米团簇的单电子隧穿效应研究、制备金属/绝缘体多层膜的新方法的探索、C60-金属相互作用与纳米复合结构、纳米金属/半导体颗粒、一维纳米材料结构与生长、高富勒烯及有机超分子高分辨结构表征、磁性薄膜材料的电学和磁学性质、分子自组装单层膜电子输运特性、隧穿过程中的噪声、二维和三维分子吸附态的实验和理论、半导体量子点的制备和特性、氧化物薄膜和量子点的制备和表征等

北京大学微米/纳米加工技术国家级重点实验室实验室的建设宗旨是：进行微电子机械系统（MEMS）加工技术的研究；与其它单位开展MEMS技术合作和应用研究；为国内外重大MEMS技术研究项目提供微加工技术服务；开展MEMS技术的产业化研究工作

北京大学纳米化学研究室隶属于北京大学化学院现代物理化学研究中心和北京大学纳米科学与技术研究中心，创建于1993年6月

上海交通大学微纳米技术研究院下设信息存储研究中心和微电子技术研究所，具有“微电子学与固体电子学“博士点和硕士点；主要研究方向：薄膜电子材料与器件、微米技术、微光机电系统、纳米电子科学与技术、微电子技术 　

台湾大学工学院微机电系统研究中心研究中心所扮演的角色为系统整合与基础制程技术之研究，各系所则扮演垂直分工的角色，致力於发展其专长技术，透过资讯、通讯、半导体、自动化和生医等各项重点产业发展计划作横向整合

Berkeley Sensors and Actuators CenterBerkeley Sensor & Actuator Center (BSAC) is a NSF/Industry/University cooperative research center funded by the National Science Foundation and a consortium of corporations and government agencies. Since its foundation in 1986, BSAC has been devoted to research on sensors and miniature moving mechanical elements or MEMS (MicroElectro Mechanical Systems) that take advantage of the remarkable progress made in integrated-circuit technology. BSAC researchers fabricate most of their devices in the UC Berkeley Microfabrication Laboratory.

Carnegie Mellon Microelectromechanical Systems LaboratoryThe Microelectromechanical Systems (MEMS) Laboratory is associated jointly with the Department of Electrical and Computer Engineering and the Robotics Institute (part of the School of Computer Science) at Carnegie Mellon University. In the MEMS Lab, we are developing miniature sensor and actuator systems made using batch-fabrication processes, especially integrated-circuit fabrication processes. Research in this area is motivated by the potential to produce high performance, low-cost, miniature sensors and actuators. Smart sensors are made by combining microstructures and circuits on a single silicon chip. Specific research areas of interest include nanometer-scale data storage, microsensors and microactuators, MEMS design tools, micromechanical component modeling, embedded microinstruments, and microrobotics.

Center for Design Research (CDR) at Stanford斯坦福大学设计研究中心致力于开发先进的设计和制造工具与方法，该网站提供协同设计、分布式协同工程计算代理的体系结构、以及美国工程教育的国家性研究项目等的信息和服务

Center for Integrated Nanotechnologiesis a Department of Energy/Office of Science Nanoscale Science Research Center (NSRC) operating as a national user facility devoted to establishing the scientific principles that govern the design, performance, and integration of nanoscale materials.

Center for Nanoscale Science and Technology at Rice University

Centers for Nanotechnology美国航空航天局（NASA）纳米技术中心，1996年成立，主要研究领域：computational nanotechnology, computational nanoelectronics, computational optoelectronics, and computational modeling of processes encountered in nanofabrication.

Center for Nanotechnology at the University of Washington

Cornell NanoScale Science & Technology Facilityhas served the US research community for more than 25 years. Subjects of research encompass physical sciences, life sciences, and engineering, particularly with inter-disciplinary emphasis

CU MEMSwebUniversity of Corolado MEMSweb

IBM Almaden Research Center Visualization Lab

IBM Research - NanotechnologyIBM's nanotechnology research aims to devise new atomic- and molecular-scale structures and devices for enhancing information technologies, as well as discover and understand their scientific foundations　

Laboratory for Molecular Robotics (LMR) at University Of Southern Californiawas founded in 1994 with the primary goal of studying manipulation of molecular-sized components with Scanning Probe Microscopes (SPMs)

Materials and Process Simulation Center (MSC) at The Beckman Institute at Caltech

Microfabrication and MEMS Laboratory at Northeastern UniversityThe Microfabrication Laboratory (MFL) was officially established in November of 1995. The laboratory conducts research in two primary areas; MicroElectroMechanical Systems (MEMS) and Transferred Film Technology (TFT). In MEMS, the laboratory's areas of expertise include bulk micromachining, with an emphasis on anisotropic etching and alloy bonding, and nickel plated surface micromachining. In TFT, the laboratory is investigating three dimensional circuits including a CMOS image array and a 64 bit RISC microprocessor

Quate Group隶属美国斯坦福大学；主要研究领域：Micromachining, imaging, lithography, biosensors, and other microsystems-related work at Stanford University

Sandia National Laboratories, Intelligent Micromachine Initiative美国Sandia国家实验室；is a recognized leader in this emerging field. Sandia has developed unique technologies which enable the realization of complex mechanical systems on a chip, and the integration of these mechanical systems with on-chip control and communication electronics.

UCLA Micromanufacturing Laboratory美国加州大学洛杉矶分校微制造实验室，主要从事MEMS、纳米结构的表面改性、DNA微阵列、微燃料细胞等研究

UCSB MEMS Lab美国加州大学圣巴巴拉分校由Kimberly Turner教授领导的微机电系统特性实验室，主要从事微级别器件的物理特性研究

UCSB MEMS Prof. Noel MacDonald's Group美国加州大学圣巴巴拉分校由Noel MacDonald领导的微机电系统实验室，主要从事有关微/纳米结构创建方面的研究，包括对生物MEMS、光/电MEMS等器件的基本性能的研究

Institute of Nanotechnology英国

London Centre for NanotechnologySome examples of the Centre’s scientific focus areas are Fabrication Research、Theory and Modeling、Experiments on Chips and Tips、Novel electronics、Nanobiology　

Ultra-precise surface treatment德国